Thermal annealing of Ag implanted silicon: Relationship between structural and optical properties
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DOI: 10.2298/sos2002207m
Abstract: Low energy Ag ions were implanted into silicon and annealed at different temperatures in order to generate plasmonic active silicon hybrids. It was found that as the ion fluence of irradiation was increased, a monotonic… read more here.
Keywords: thermal annealing; relationship structural; annealing implanted; silicon relationship ... See more keywords