Comparative study of anodization of small-scale and wafer-scale aluminum films on a silicon substrate and controlling pores shape for practical applications
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DOI: 10.1016/j.jelechem.2021.115367
Abstract: Abstract Porous anodic alumina (PAA), comprising arranged pores in hexagonal cells obtained by anodizing aluminum (Al), has been studied and is usually used as a template for synthesizing one-dimensional nanostructure. However, there is growing interest… read more here.
Keywords: anodization; comparative study; study anodization; small scale ... See more keywords