Study of initiation and development of local oxidation phenomena during anodizing of SiC
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DOI: 10.1016/j.elecom.2018.02.013
Abstract: Abstract Even though anodizing has been proved to be a highly efficient oxidation approach of single crystal SiC, the oxidation mechanism is still unrevealed. In this work, the initiation and development of the local oxidation… read more here.
Keywords: anodizing sic; oxidation; initiation development; development local ... See more keywords