Influence of Annealing on the Properties of Ge:Sb/Si(001) Layers with an Antimony Concentration Above Its Equilibrium Solubility in Germanium
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DOI: 10.1134/s106378261907025x
Abstract: The influence of rapid thermal annealing on the electrical and radiative properties of Ge:Sb/Si(001) epitaxial layers with an antimony concentration substantially higher than its equilibrium solubility in germanium is investigated. Local variations in the electrical… read more here.
Keywords: solubility germanium; equilibrium solubility; layers antimony; properties 001 ... See more keywords