128-pixel arrays of 4H-SiC UV APD with dual-frequency PECVD SiNx passivation.
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DOI: 10.1364/oe.402323
Abstract: In this paper, high-performance 1×128 linear arrays of 4H-SiC ultraviolet (UV) avalanche photodiode (APD) with dual-frequency plasma enhanced chemical vapor deposition (PECVD) passivation are demonstrated for the first time. The results show that SiNx dielectric… read more here.
Keywords: arrays sic; passivation; pecvd; frequency ... See more keywords