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Published in 2018 at "Nanomaterials"
DOI: 10.3390/nano8070536
Abstract: Optical methods in nanolithography have been traditionally limited by Abbe’s diffraction limit. One method able to overcome this barrier is apertureless scanning probe lithography assisted by laser. This technique has demonstrated surface nanostructuring below the…
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Keywords:
apertureless scanning;
laser;
probe lithography;
scanning probe ... See more keywords