A Monolithic Approach to Downscaling Silicon Piezoresistive Sensors
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DOI: 10.1109/jmems.2017.2679219
Abstract: Multi-scale integration remains the primary challenge in the fabrication of miniature piezoresistive sensors, as the co-fabrication of a silicon nanowire along with a microscale shuttle is the main architecture facilitating high-sensitivity transduction. The efforts in… read more here.
Keywords: monolithic approach; approach downscaling; nanowire; piezoresistive sensors ... See more keywords