An Approach of Inertial Generated Timing Sequence for Bi-Stable MEMS Switches
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DOI: 10.1109/jmems.2019.2916599
Abstract: A bi-stable MEMS switch is introduced in this letter. For the first time, the timing sequence of this switch is generated by an additional mass block rather than an external circuit or active chip. To… read more here.
Keywords: stable mems; generated timing; timing sequence; inertial generated ... See more keywords