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Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618013971
Abstract: Beamline 2-ID-D/E at the APS provide advanced scanning microprobe capabilities to diverse user communities such as materials science, energy science, environmental science, life science. Applications include, for instance, measuring microelectronics defects in 3D, local structure…
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Keywords:
status future;
science;
future plans;
aps microprobes ... See more keywords