Aqueous chemical solution deposition of ultra high-k LuFeO3 thin films
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DOI: 10.1016/j.jeurceramsoc.2016.08.042
Abstract: Abstract Thin orthorhombic ultra high- k LuFeO 3 (LFO) films on Si 3 N 4 /SiO 2 /Si substrates were obtained by means of aqueous chemical solution deposition (CSD). Prior to thin film deposition, the… read more here.
Keywords: aqueous chemical; solution deposition; ultra high; deposition ... See more keywords