XPS investigation of monatomic and cluster argon ion sputtering of tantalum pentoxide
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DOI: 10.1016/j.apsusc.2017.02.006
Abstract: In recent years, gas cluster ion beams (GCIB) have become the cutting edge of ion beam technology to sputter etch organic materials in surface analysis. However, little is currently known on the ability of argon… read more here.
Keywords: xps investigation; ar1000; ion; cluster ... See more keywords