A setup for arc-free reactive DC sputter deposition of Al-O-N
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DOI: 10.1016/j.surfcoat.2019.01.082
Abstract: Abstract Aluminum oxynitride (Al-O-N) is a material suitable for hard, transparent thin films. Its physical properties and structure can be adjusted through the O-to-N ratio. Reactive Direct Current Magnetron Sputtering (R-DCMS) is a practical, widespread… read more here.
Keywords: reactive sputter; arc free; sputter deposition; deposition ... See more keywords