A double-side electrically-actuated arch microbeam for pressure sensing applications
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DOI: 10.1016/j.ijmecsci.2020.105624
Abstract: Abstract In this study, we consider a pressure sensor whose main component is a clamped-clamped shallow arched microbeam. Two fixed electrodes are used to actuate the microbeam in the transverse direction. The lower electrode is… read more here.
Keywords: electrically actuated; double side; arch microbeam; microbeam ... See more keywords