Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads
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DOI: 10.3390/mi8010014
Abstract: We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes… read more here.
Keywords: tunable clamped; arch; clamped guided; arch resonators ... See more keywords