Comparison of the effect of arched and through magnetic field configurations in cathodic arc deposition
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DOI: 10.1080/02670844.2019.1653598
Abstract: ABSTRACT Cathodic arc deposition, in spite of all its advantages, including feasible alloying evaporation, high deposition rate and considerable adhesion, faces the challenge of macroparticles. In this article, the influence of arched and through magnetic… read more here.
Keywords: cathodic arc; arched magnetic; field; arc deposition ... See more keywords