Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer
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DOI: 10.1109/jmems.2023.3334297
Abstract: High-precision MEMS accelerometers with nano-g resolution are emergent instruments for geophysical applications and proved their competence in terms of functionality. The electromagnetic actuator, which serves as an auxiliary component in nano-g MEMS accelerometers for improving… read more here.
Keywords: mems accelerometer; area changed; changed capacitive; nano mems ... See more keywords