Focused laser lithographic system for efficient and cross-scale fabrication of large-area and 3D micro-patterns
Sign Up to like & getrecommendations! Published in 2018 at "Optics and Lasers in Engineering"
DOI: 10.1016/j.optlaseng.2018.04.010
Abstract: Abstract A novel focused laser lithographic system with a low-power ultraviolet laser, a high-speed galvanometer scanner and a customized F-theta lens was constructed and demonstrated for cross-scale, high-efficiency and low-cost fabrication of large-area micro-patterns. In… read more here.
Keywords: system; micro patterns; area micro; cross scale ... See more keywords