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Published in 2020 at "RSC Advances"
DOI: 10.1039/d0ra02567d
Abstract: Antimony telluride (Sb2Te3) thin films were prepared by a room temperature Metal–Organic Chemical Vapor Deposition (MOCVD) process using antimony chloride (SbCl3) and bis(trimethylsilyl)telluride (Te(SiMe3)2) as precursors. Pre-growth and post-growth treatments were found to be pivotal…
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Keywords:
thin films;
large area;
epitaxial large;
area sb2te3 ... See more keywords