A Study on the Resolution and Depth of Focus of ArF Immersion Photolithography
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DOI: 10.3390/mi13111971
Abstract: In this study, the resolution and depth of focus (DOF) of the ArF immersion scanner are measured experimentally according to numerical aperture (NA). Based on the experiment, the theoretical trade-off relationship between the resolution and… read more here.
Keywords: arf immersion; depth focus; focus; resolution depth ... See more keywords