The Influence of Argon Cluster Ion Bombardment on the Characteristics of AlN Films on Glass-Ceramics and Si Substrates
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DOI: 10.3390/nano12040670
Abstract: In this paper, the influence of surface modification on the characteristics and properties of AlN thin films on Si and glass-ceramics substrates is investigated. The surface modification was made at various parameters of argon cluster… read more here.
Keywords: cluster ion; influence; surface; cluster ... See more keywords