Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints
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DOI: 10.1109/tase.2024.3349380
Abstract: Scheduling single-robotic-arm cluster tools subject to wafer residency time constraints has received much attention. Compared to some scheduling strategies that use all processing modules (PMs) to process wafers, it is much more challenging to schedule… read more here.
Keywords: time; arm cluster; cluster tools; single robotic ... See more keywords