Analysis of local strain fields around individual threading dislocations in GaN substrates by nanobeam x-ray diffraction
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DOI: 10.1063/5.0199961
Abstract: Position-dependent three-dimensional reciprocal space mapping (RSM) by nanobeam x-ray diffraction (nanoXRD) was performed to reveal the strain fields produced around individual threading dislocations (TDs) in GaN substrates. The distribution and Burgers vector of TDs for… read more here.
Keywords: nanobeam ray; analysis; around individual; strain fields ... See more keywords