Development of a 2D array of micromachined electromagnetic digital actuators for micro-conveyance applications
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DOI: 10.1007/s00542-017-3320-1
Abstract: In this paper a 5 × 5 micromachined digital electromagnetic actuator array for microdisplacements is presented. Each elementary actuator is composed of a permanent magnet placed in a silicon square cavity. This magnet can be switched between… read more here.
Keywords: array; micromachined electromagnetic; array micromachined; development array ... See more keywords