Atomic-Scale Patterning of Arsenic in Silicon by Scanning Tunneling Microscopy
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DOI: 10.1021/acsnano.9b08943
Abstract: Over the past two decades, prototype devices for future classical and quantum computing technologies have been fabricated by using scanning tunneling microscopy and hydrogen resist lithography to position phosphorus atoms in silicon with atomic-scale precision.… read more here.
Keywords: tunneling microscopy; microscopy; atomic scale; scanning tunneling ... See more keywords