Spectroscopic imaging ellipsometry of self-assembled SiGe/Si nanostructures
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DOI: 10.1016/j.apsusc.2016.10.123
Abstract: Abstract Spectroscopic imaging ellipsometry is used to characterize films containing self-assembled SiGe/Si in-plane nanowires grown by molecular beam epitaxy on a Si(001) substrate. The spatial resolution of the order of ∼1 μm allows to study individual… read more here.
Keywords: ellipsometry; spectroscopic imaging; assembled sige; self assembled ... See more keywords