Laser-assisted doping of graphene for transparent conducting electrodes
Sign Up to like & getrecommendations! Published in 2021 at "Materials Chemistry and Physics"
DOI: 10.1016/j.matchemphys.2021.124348
Abstract: Abstract In this work, we study the role of laser irradiation in the control of the doping processing for directly grown graphene using microwave surface wave plasma chemical vapor deposition (MW-SWP-CVD) on the glass substrates.… read more here.
Keywords: assisted doping; microscopy; laser assisted; doping graphene ... See more keywords
Conformal and Ultra Shallow Junction Formation Achieved Using a Pulsed-Laser Annealing Process Integrated With a Modified Plasma Assisted Doping Method
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Access"
DOI: 10.1109/access.2020.3024636
Abstract: Recently, a shallow and conformal doping profile is required for promising 3D structured devices. In this study, we deposited the dopant phosphorus (P) using modified plasma assisted doping (PaD) followed by an annealing process to… read more here.
Keywords: assisted doping; modified plasma; process; junction ... See more keywords