Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression
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DOI: 10.1109/lpt.2017.2787100
Abstract: A route of spatial modulation-assisted scanning white-light interferometry with the inhibition of background noises and light source fluctuations for the topography measurement of micro-/nano-structure surface was explored in this letter. The spatial modulation frequency was… read more here.
Keywords: modulation; modulation assisted; scanning white; spatial modulation ... See more keywords