Morphology and microstructure of Mg-Ti-H films deposited by microwave plasma-assisted co-sputtering
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2017.03.044
Abstract: Mg-Ti-H films with a Ti content in the range 0 at.% Ti < 20 were obtained in a single-step process using the microwave reactive plasma-assisted co-sputtering technique. The morphology, crystal structure, chemical composition and spatial… read more here.
Keywords: plasma assisted; morphology microstructure; assisted sputtering;
Formation of Cu2O and ZnO Crystal Layers by Magnetron Assisted Sputtering and Their Optical Characterization
Sign Up to like & getrecommendations! Published in 2018 at "Semiconductors"
DOI: 10.1134/s1063782618030028
Abstract: Copper (I) oxide and zinc oxide films are formed on silicon and glassy quartz substrates by magnetron assisted sputtering. The thickness of the films is tens and hundreds of nanometers. The films are grown at… read more here.
Keywords: formation cu2o; crystal layers; cu2o zno; assisted sputtering ... See more keywords
Tantalum oxide and silicon oxide mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors.
Sign Up to like & getrecommendations! Published in 2022 at "Applied optics"
DOI: 10.1364/oic.2022.wb.2
Abstract: This work presents the characterization of the optical and mechanical properties of thin films based on (T a 2 O 5)1-x (S i O 2)x mixed oxides deposited by microwave plasma assisted co-sputtering, including post-annealing… read more here.
Keywords: coatings gravitational; microwave plasma; assisted sputtering; plasma assisted ... See more keywords