Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures
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DOI: 10.1038/s41598-018-27945-6
Abstract: Electron heating is a fundamental and multidisciplinary phenomenon in partially ionized gases, from the planet’s ionosphere to laboratory-scale plasmas. Plasmas produced at ambient or reduced pressures have recently shown potential for scientific and industrial applications.… read more here.
Keywords: electron heating; subatmospheric pressures; atmospheric subatmospheric; electron temperature ... See more keywords