Experimental Formation and Mechanism Study for Super-High Dielectric Constant AlOx/TiOy Nanolaminates
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DOI: 10.3390/nano13071256
Abstract: Super-high dielectric constant (k) AlOx/TiOy nanolaminates (ATO NLs) are deposited by an atomic layer deposition technique for application in next-generation electronics. Individual multilayers with uniform thicknesses are formed for the ATO NLs. With an increase… read more here.
Keywords: tioy; super high; alox; ato nls ... See more keywords