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Published in 2023 at "Nano letters"
DOI: 10.1021/acs.nanolett.3c00114
Abstract: Direct-write processes enable the alteration or deposition of materials in a continuous, directable, sequential fashion. In this work, we demonstrate an electron beam direct-write process in an aberration-corrected scanning transmission electron microscope. This process has…
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Keywords:
atom direct;
deposition;
direct writing;
electron beam ... See more keywords