Hexagonal boron nitride grown using high atomic boron emission during microwave plasma chemical vapor deposition
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DOI: 10.1116/1.5123210
Abstract: Boron nitride (BN) is a member of Group III nitrides and continues to spark interest among the scientific community for its mechanical properties, chemical inertness, thermal conductivity, and electrical insulating properties. In this study, microwave… read more here.
Keywords: plasma chemical; emission; atomic boron; boron nitride ... See more keywords