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Published in 2019 at "Surface and Interface Analysis"
DOI: 10.1002/sia.6704
Abstract: We develop a simple semiempirical model that correlates the Auger parameter to the ground state valence charge of the core‐ionized atom with closed shell electron configuration. Until now, the Auger parameter was employed to separate…
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Keywords:
ground state;
parameter;
auger parameter;
valence charge ... See more keywords
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Published in 2019 at "Journal of Electron Spectroscopy and Related Phenomena"
DOI: 10.1016/j.elspec.2019.04.004
Abstract: Abstract A particular wafer processing step involves deposition of a Ti thin film (˜6 nm to ˜13 nm) on Si, under processing conditions intended to form a silicide with specific electrical properties. It is difficult, however, to…
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Keywords:
use kll;
shifts auger;
kll auger;
auger parameter ... See more keywords