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Published in 2019 at "Applied optics"
DOI: 10.1364/ao.58.008449
Abstract: In this paper, a micro-electro-mechanical system-based cantilever is integrated as a line defect on a photonic crystal silicon slab for optical switching applications. The elliptical holes are etched in the photonic crystal waveguide that result…
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Keywords:
mems cantilever;
photonic crystal;
augmenting performance;
performance mems ... See more keywords