A robust SEM auto-focus algorithm using multiple band-pass filters
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DOI: 10.1088/1361-6501/28/1/015403
Abstract: An auto-focus algorithm using multiple band-pass filters for a scanning electron microscope (SEM) is proposed. To acquire sharp images of various kinds of defects by SEM defect observation in semiconductor manufacturing, the auto-focus process must… read more here.
Keywords: band pass; auto focus; focus; multiple band ... See more keywords