A robust SEM auto-focus algorithm using multiple band-pass filters
Sign Up to like & getrecommendations! Published in 2017 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/28/1/015403
Abstract: An auto-focus algorithm using multiple band-pass filters for a scanning electron microscope (SEM) is proposed. To acquire sharp images of various kinds of defects by SEM defect observation in semiconductor manufacturing, the auto-focus process must… read more here.
Keywords: band pass; auto focus; focus; multiple band ... See more keywords
Learning-Based Auto-Focus and 3D Pose Identification of Moving Micro- and Nanowires in Fluid Suspensions
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Transactions on Automation Science and Engineering"
DOI: 10.1109/tase.2024.3389592
Abstract: Precise manipulation of micro- and nano-objects through visual feedback is challenging because of the difficulty of observing their motion along the line-of-sight of microscopes. This paper presents an efficient learning-based auto-focus (AF) and visual posture… read more here.
Keywords: based auto; micro nanowires; moving micro; learning based ... See more keywords