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Published in 2019 at "Advanced Functional Materials"
DOI: 10.1002/adfm.201900642
Abstract: The ability to quickly and reliably fabricate nanoscale pore arrays in ultrathin membranes such as silicon nitride (SixN) is extremely important for the growing field of nanopore biosensing. Laser-based etching of thin SixN membranes immersed…
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