Convolutional Autoencoder and Transfer Learning for Automatic Virtual Metrology
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DOI: 10.1109/lra.2022.3187617
Abstract: To ensure stable processing and high-yield production, high-tech factories (e.g., semiconductor, TFT-LCD) demand product quality total inspection. Generally speaking, sampling inspection only measures a few samples and comes with metrology delay, thus it usually cannot… read more here.
Keywords: convolutional autoencoder; virtual metrology; transfer learning; metrology ... See more keywords