Optimizing the ion diffusion in bipolar-pulse HiPIMS discharge (BP-HiPIMS) via an auxiliary anode
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DOI: 10.1088/1361-6595/ac1383
Abstract: The investigation of plasma dynamics and optimization of target particle diffusion are particularly important and urgent in the recently emerging bipolar-pulse high-power impulse magnetron sputtering (BP-HiPIMS) discharge. In this paper, a novel approach, in which… read more here.
Keywords: diffusion; target; auxiliary anode; ion ... See more keywords