MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation
Sign Up to like & getrecommendations! Published in 2025 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2025.3543166
Abstract: The fracture failure of dual-axis micromirrors under the AEC-Q100 qualification test could not be mitigated by structural designs alone due to the need for compatibility in bending and torsional stiffness. To address this, a passive… read more here.
Keywords: dual axis; isolator; vibration; axis micromirrors ... See more keywords