A Dual-Axis MOEMS Accelerometer
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DOI: 10.1109/jsen.2021.3072333
Abstract: This paper is a report on the design and fabrication of a dual-axis micro-opto-electro-mechanical system (MOEMS) accelerometer. The device consists of a proof mass (PM) suspended by four L-shaped springs. Two Fabry-Pérot (FP) cavities are… read more here.
Keywords: axis; axis moems; dual axis; moems accelerometer ... See more keywords