Sensitivity improvement of a dual axis thermal accelerometer with modified cavity structure
Sign Up to like & getrecommendations! Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3338-4
Abstract: An improved dual axis thermal accelerometer is proposed in this paper. The thermal accelerometer consists of a centrally placed micro-heater, temperature detectors (placed symmetrically opposite of the heater) and silicon islands. A cavity is etched… read more here.
Keywords: dual axis; sensitivity; accelerometer; axis thermal ... See more keywords