Analysis of thermoelastic damping limited quality factor and critical dimensions of circular plate resonators based on axisymmetric and non-axisymmetric vibrations
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DOI: 10.1063/5.0033087
Abstract: Thermoelastic damping effects are very important intrinsic losses in microelectromechanical system/nanoelectromechanical system based sensors and filters, which limit the maximum achievable quality factor. Thermoelasticity arises due to coupling between the temperature field and elastic field… read more here.
Keywords: non axisymmetric; thermoelastic damping; quality factor; axisymmetric vibrations ... See more keywords