A two-region model for azimuthal striations in an inductively coupled plasma
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DOI: 10.1088/1361-6595/ad1c08
Abstract: A two-region discharge model with a perturbation analysis was developed for the azimuthal striations observed in an inductively coupled plasma with an immersed cylindrical coil at pressures of 75–1500 mTorr. This model partitions the discharge… read more here.
Keywords: inductively coupled; azimuthal striations; two region; model ... See more keywords