Magnetron sputtering deposition of Zn/AZO multilayer films: Towards the understanding of Zn diffusion in AZO film
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DOI: 10.1016/j.rinp.2019.102286
Abstract: Abstract The substrate/(200–900 nm) Al:ZnO (AZO)/15 nm Zn films were deposited on glass substrates at room temperature by magnetron sputtering, followed by a face-to-face annealing in vacuum. The effect of AZO thickness and the annealing treatment on… read more here.
Keywords: multilayer films; diffusion; sputtering deposition; azo ... See more keywords