MEMS-based fabrication of high-performance inductors with back hollow structure and ferromagnetic film
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DOI: 10.1016/j.mee.2016.10.005
Abstract: Abstract The development of novel on-chip device techniques is attracting more and more interest because of the increasing demand for communication electronics, wearable devices and Internet of Things (IoT) with features of low power consumption,… read more here.
Keywords: hollow structure; mems based; back hollow; film ... See more keywords
Novel on-chip spiral inductors with back hollow structure
Sign Up to like & getrecommendations! Published in 2017 at "Modern Physics Letters B"
DOI: 10.1142/s0217984916504303
Abstract: In this work, on-chip spiral inductors with back hollow structure have been prepared on the 500 μm thick silicon substrate with high resistivity (ρ > 5000Ωcm). The silicon underneath the inductor r... read more here.
Keywords: hollow structure; inductors back; spiral inductors; chip spiral ... See more keywords