High performance BAW resonators with improved AlN thin films quality based on BaF2 buffer layer
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DOI: 10.1063/5.0245758
Abstract: The quality of AlN thin films has an important effect on the performance of bulk acoustic wave (BAW) resonators. In this work, the low lattice mismatch of BaF2 buffer layer with AlN thin films was… read more here.
Keywords: buffer layer; thin films; aln thin; baf2 ... See more keywords