The Effect of Bake Temperature on SU-8 Gate Insulator of IGZO Thin Film Transistor
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DOI: 10.3938/jkps.73.297
Abstract: SU-8 photoresist was applied to the gate insulator of a-IGZO TFT. The hard bake temperature of SU-8 is important and was varied from 95 to 185 °C. The FTIR showed that hard-bake temperature higher than… read more here.
Keywords: bake temperature; insulator igzo; bake; gate insulator ... See more keywords