Balanced-Bridge Method for the Characterization of Dielectric Charging in RF MEMS Cantilever Switches
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2019.2950104
Abstract: This paper presents a balanced-bridge method for the characterization of dielectric charging effect in RF MEMS (radio frequency micro-electromechanical system) cantilever switches. The method measures the relative change of up-state capacitance caused by dielectric charging.… read more here.
Keywords: dielectric charging; balanced bridge; method characterization; cantilever switches ... See more keywords