Development of surface barrier detectors of low leakage current employing argon cold plasma assisted silicon surface cleaning prior to detector fabrication
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DOI: 10.1088/1748-0221/13/09/p09019
Abstract: The performance of silicon surface barrier detectors was improved by atmospheric pressure argon cold plasma assisted surface cleaning compared to routine cleaning using organic solvents, prior to edge protection using epoxy, then followed by metallization.… read more here.
Keywords: surface; cold plasma; surface barrier; barrier detectors ... See more keywords