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Published in 2018 at "Inorganic Materials: Applied Research"
DOI: 10.1134/s2075113318030097
Abstract: The technique of deposition of polymer films from the barrier gas discharge plasma on top of dielectric substrates is developed. The film precursor is a monomer material highly dispersed in a transport plasma gas. The…
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Keywords:
polymer film;
polymer;
discharge;
film ... See more keywords